The nonmonotonic dependence of the intensities of vibrational lines in the Raman scattering of TiO2 nanofilms, including Ag and Au nanoparticles, from the irradiation dose D by Ti+ (140 keV) ions was established. The increase of the intensity in 1.3-1.5times for TiO2 films at D = 1012 - 1013 ions/cm2 related with improved of films structure at low doses. The enhancement of low-frequency electronic bands with dose increasing was study. It was shown that the effect of plasmon is not a major and the vibrational-electronic interaction plays the main function.
